Effect of aggressive gases on capacitance manometers

October 2002
Solid State Technology;Oct2002, Vol. 45 Issue 10, p61
Trade Publication
Focuses on the use of capacitance manometers to detect pressure on plasma etching and chemical vapor deposition. Effects of aggressive gases on capacitance manometers; Reliability of capacitance manometers; Comparison on the characteristics of inconel- and ceramic-diaphragm manometers.


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