TITLE

Effect of aggressive gases on capacitance manometers

PUB. DATE
October 2002
SOURCE
Solid State Technology;Oct2002, Vol. 45 Issue 10, p61
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Focuses on the use of capacitance manometers to detect pressure on plasma etching and chemical vapor deposition. Effects of aggressive gases on capacitance manometers; Reliability of capacitance manometers; Comparison on the characteristics of inconel- and ceramic-diaphragm manometers.
ACCESSION #
7575388

 

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