ASML Putting ALD on Fast Track

Chappell, Jeff
September 2002
Electronic News;9/16/2002, Vol. 48 Issue 38, p16
Trade Publication
Reports on the decision of tool maker ASML to license its atomic layer deposition (ALD) tool. Other product of ASML; Reason for high demand for ALD tool; Information on the ALD developed by Samsung Electronics Co. Ltd.


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