TITLE

Small-Size Systems for Separation of Primary Ion Beams in Microprobe Equipment

AUTHOR(S)
Kuzema, S. A.; Mordik, S. N.
PUB. DATE
November 2001
SOURCE
Technical Physics;Nov2001, Vol. 46 Issue 11, p1470
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The ion-optical properties and other characteristics of various versions of a double-focusing mass separator are studied. In these designs, the ion transit path is shortened by appropriately selecting the geometry of the ion-optical system. The resolving power of the separating systems is determined with allowance for second-order aberrations.
ACCESSION #
7291843

 

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