TITLE

Adsorption dynamics and angular dependency of contaminants on Ru mirror surfaces

AUTHOR(S)
Catalfano, M.; Kanjilal, A.; Al-Ajlony, A.; Harilal, S. S.; Hassanein, A.
PUB. DATE
January 2012
SOURCE
Journal of Applied Physics;Jan2012, Vol. 111 Issue 1, p016103
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A real time contamination of the Ru surface and corresponding effect on its work function were studied using extreme ultraviolet photoelectron spectroscopy with a 13.5-nm wavelength of light. The change in work function indicates formation of molecular dipoles, oriented outward from the Ru surface. X-ray photoelectron spectroscopy investigations suggest variation in electromagnetic interaction with the components of the adsorbed foreign species when the emission angle from the target surface was changed from 0° to 50°; H2O and C-On show a strong coupling at lower angles and OH dominates at higher angles, whereas carbon is found in the mid-range peaking at 30°.
ACCESSION #
70338632

 

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