Femtosecond laser induced crystallization and permanent relief grating structures in amorphous inorganic (In[sub 2]O[sub 3]+1 wt % TiO[sub 2]) films

Katayama, Shigeru; Tsutsumi, Naoto; Nakamura, Toshitaka; Horiike, Mika; Hirao, Kazuyuki
July 2002
Applied Physics Letters;7/29/2002, Vol. 81 Issue 5, p832
Academic Journal
This letter presents an investigation of crystalline relief grating structures induced by irradiation of near-infrared femtosecond laser pulses on an amorphous inorganic (In[sub 2]O[sub 3] + 1 wt % TiO[sub 2]) film. The shapes of crystallized relief structures were sensitive to the scanning rate and the focused point height of irradiation, and the optimized irradiation condition gave cone-shaped cross section structures. Selective wet etching on unirradiated amorphous regions using a 3% hydrochloric acid solution could make sharper relief grating structures of crystalline regions. Diffraction efficiency of the relief grating structures with Au coating was measured, and it was confirmed that first-order diffraction, efficiencies were approximately 40% and 20% for etched and nonetched samples, respectively.


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