TITLE

300mm Driving Inline Metrology

AUTHOR(S)
Chappell, Jeff
PUB. DATE
June 2002
SOURCE
Electronic News;06/24/2002, Vol. 48 Issue 26, p24
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Provides information on the development of online metrology tools as of June 2002. Thin-film metrology tools introduced by KLA-Tencor Corp. and Rudolph Technologies Inc.; Function of resolution optics; Technologies of Rudolph that would be able to meet the measurement requirements for the growing pervasiveness of silicon germanium technology.
ACCESSION #
6889972

 

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