300mm Driving Inline Metrology

Chappell, Jeff
June 2002
Electronic News;06/24/2002, Vol. 48 Issue 26, p24
Trade Publication
Provides information on the development of online metrology tools as of June 2002. Thin-film metrology tools introduced by KLA-Tencor Corp. and Rudolph Technologies Inc.; Function of resolution optics; Technologies of Rudolph that would be able to meet the measurement requirements for the growing pervasiveness of silicon germanium technology.


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