Nanomechanical resonant structures as tunable passive modulators of light

Sekaric, L.; Zalalutdinov, M.; Turner, S. W.; Zehnder, A. T.; Parpia, J. M.; Craighead, H. G.
May 2002
Applied Physics Letters;5/13/2002, Vol. 80 Issue 19, p3617
Academic Journal
We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 μW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20 000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive. © 2002 American Institute of Physics.


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