Electrical time resolved metrology of dust particles growing in low pressure cold plasmas

Wattieaux, Gaëtan; Mezeghrane, Abdelaziz; Boufendi, Laïfa
September 2011
Physics of Plasmas;Sep2011, Vol. 18 Issue 9, p093701
Academic Journal
The electrical parameters of a capacitively coupled radiofrequency (CCRF) discharge change significantly when dust arises in the discharge. This work demonstrates the ability to follow in real time the evolution of the size and of the concentration of dust particles forming in a CCRF discharge from the variation of the electron density and of the self-bias voltage of the active electrode. According to experimental findings, it appears that the variation of this self-bias voltage depends on the surface of the dust particles. This trend is confirmed by an analytical modelling considering the low frequency behaviour of the phenomenon.


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