Principle and application of a thermal probe to reactive plasmas

Stamate, E.; Sugai, H.; Ohe, K.
April 2002
Applied Physics Letters;4/29/2002, Vol. 80 Issue 17, p3066
Academic Journal
A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF[sub 6], and O[sub 2] show good agreement among the plasma parameters using thermal and Langmuir probes. © 2002 American Institute of Physics.


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