Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

Jiang, X.; Jia, C. L.; Szyszka, B.
April 2002
Applied Physics Letters;4/29/2002, Vol. 80 Issue 17, p3090
Academic Journal
(0001)-oriented aluminum-doped zinc oxide films were prepared using a magnetron sputtering technique. High-resolution transmission-electron-microscopic images show that the oriented grains nucleate directly on the substrate surface and grow with equal lateral dimensions through the film thickness. A surface-energy-driven self-texture mechanism was proposed on the basis of process modes. A method for manufacturing specific film structure by patterning the substrate surface is tested and discussed. © 2002 American Institute of Physics.


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