Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Bu¨hlmann, S.; Dwir, B.; Baborowski, J.; Muralt, P.
April 2002
Applied Physics Letters;4/29/2002, Vol. 80 Issue 17, p3195
Academic Journal
An epitaxial 200 nm thick film of Pb(Zr[sub 0.40]Ti[sub 0.60])O[sub 3] (PZT) has been deposited by reactive rf magnetron sputtering on conductive Nb-doped SrTiO[sub 3] (100) (STO). The patterning process involved electron-beam lithography of polymethylmethacrylate, fabrication of a 75 nm thick Cr hard mask layer by means of a lift-off process, and dry etching of PZT. The smallest PZT features obtained were 100 nm in lateral dimensions. Piezoelectric sensitive scanning force microscopy in the contact mode revealed a strong increase of the piezoelectric response for feature sizes with lateral dimensions below 300 nm. It is proposed that this behavior is mainly due to vanishing a domains. © 2002 American Institute of Physics.


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