Effect of tip shape on line edge roughness measurement based on atomic force microscopy

Li, Ning; Wang, Fei; Zhao, Xuezeng
December 2010
Review of Scientific Instruments;Dec2010, Vol. 81 Issue 12, p123703
Academic Journal
Atomic force microscopy (AFM) is an important tool in line edge roughness (LER) measurements, where accuracy for line edge identification is influenced by the shape of the tip. In this article, the effect of tip shape on LER measurement based on AFM is studied theoretically. The formulas for calculating the distance between the measured and actual line edge of the sample are presented. The effects of the three kinds of tips with different shapes are experimentally compared for validation. Suggestions on how to reduce measuring error caused by tip shape are also given.


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