Thermoelectron-enhanced micrometer-scale plasma generation

Ito, Tsuyohito; Terashima, Kazuo
April 2002
Applied Physics Letters;4/15/2002, Vol. 80 Issue 15, p2648
Academic Journal
The use of thermoelectrons allowed easy generation of a micrometer-scale very high-frequency plasma (thermoelectron-enhanced micrometer-scale plasma) in a fine capillary, with an inner diameter of approximately 120 μm. A tungsten wire, whose diameter was 25 μm, inserted into the region was used to provide thermoelectrons. Approximately 5 W of power was sufficient to sustain this plasma. The plasma was very stable and the discharge continued for at least 60 min. © 2002 American Institute of Physics.


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