Pulse-parameter dependence of the configuration characteristics of a micro-structure in fused SiO[sub 2] induced by femtosecond laser pulses

Luo, L.; Li, C.; Wang, D.; Yang, H.; Jiang, H.; Gong, Q.
April 2002
Applied Physics A: Materials Science & Processing;2002, Vol. 74 Issue 4, p497
Academic Journal
The fabrication of a micro-structures in fused SiO[sub 2] by femtosecond laser pulses was studied in the range of pulse duration 150∼500 fs, pulse energy 60 nJ to ∼7 μJ and wavelengths 400 nm and 800 nm. The characteristics of the cross section of the micro-structure were explained with the multiphoton-ionization and avalanche-ionization processes in the femtosecond laser-induced breakdown. The characteristics of the longitudinal length of the micro-structure relating to the direct-focusing and self-action effects are also discussed.


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