TITLE

Thickness and roughness measurements of nano thin films by interference fringe intensity curve

AUTHOR(S)
Sabzalipour, A.; Mohammadizadeh, M. R.
PUB. DATE
March 2011
SOURCE
Iranian Journal of Physics Research;Mar2011, Vol. 11 Issue 1, p3
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
In the standard optical interference fringes approach, by measuring shift of the interference fringes due to step edge of thin film on substrate, thickness of the layer has already been measured. In order to improve the measurement precision of this popular method, the interference fringes intensity curve was extracted and analyzed before and after the step preparation. By this method, one can measure a few nanometers films thickness. In addition, using the interference fringes intensity curve and its fluctuations, the roughness of surface is measured within a few nanometers accuracy. Comparison of our results with some direct methods of thickness and roughness measurements, i.e. using surface profilemeter and atomic force microscopy confirms the accuracy of the suggested improvements.
ACCESSION #
64441530

 

Related Articles

  • ESCALAMIENTO DINÁMICO Y CINÉTICA DE RUGOSIDAD EN PELÍCULAS DELGADAS DE PZT/Si(100). Ramírez, J.-G.; Cortes, A.; Lopera, W.; Gómez, M. E. // Revista Colombiana de Física;2006, Vol. 38 Issue 1, p113 

    Dynamical scaling and kinetic roughening study was done on digitized atomic force microscope (AFM) images of Pb(Zr0,48Ti0,52)O3 (PZT) thin films grown on Si(001) substrates. The films were grown via Rf-sputtering technique at high oxygen pressure and at substrate temperatures 600°C varying...

  • Electrical transport properties of n-type (110)-oriented bismuth thin films grown at 110 K on glass substrates. Wu, Keng Shuo; Chern, Ming Yau // Journal of Applied Physics;Aug2008, Vol. 104 Issue 3, p033704 

    The structure and properties of the Bi thin films, grown by pulsed laser deposition at 110 K on glass substrates in vacuum, were found to be very different from those grown at higher temperatures. The preferred orientation of the films changed from (111), when grown at room temperature, to...

  • Effects of dip-coating speed and annealing temperature on structural, morphological and optical properties of sol-gel nano-structured TiO2 thin films. Touam, Tahar; Atoui, Mohamed; Hadjoub, Ilhem; Chelouche, Azeddine; Boudine, Boubekeur; Fischer, Alexis; Boudrioua, Azzedine; Doghmane, Abdellaziz // European Physical Journal - Applied Physics;Sep2014, Vol. 67 Issue 3, p00 

    We reported material characterization of the nano-structured TiO2 thin films prepared by the sol-gel dip-coating process on glass substrates. The dependence of the structural, morphological and optical properties of the synthesized films on the fabrication parameters such as withdrawal velocity...

  • Structural contribution to the roughness of supersmooth crystal surface. Butashin, A.; Muslimov, A.; Kanevsky, V.; Deryabin, A.; Pavlov, V.; Asadchikov, V. // Crystallography Reports;May2013, Vol. 58 Issue 3, p483 

    Technological advances in processing crystals (Si, sapphire α-AlO, SiC, GaN, LiNbO, SrTiO, etc.) of substrate materials and X-ray optics elements make it possible to obtain supersmooth surfaces with a periodicity characteristic of the crystal structure. These periodic structures are formed by...

  • The Influence of Substrate on the Mechanical and Tribological Characteristics of MEMS Materials for Space Applications. MERIE, Violeta; PUSTAN, Marius; BIRLEANU, Corina; NEGREA, Gavril // Applied Mechanics & Materials;2014, Issue 658-659, p329 

    Aluminum, gold, silver, nickel, silicon, glass, silicon dioxide, silicon nitride and so on, employed as bulk materials or thin films, represent the most commonly used materials for MEMS applications within the automotive, biomedicine, spatial industries and so forth. This work is a study...

  • Influence of substrate bias voltage on the properties of sputtered nickel oxide thin films. Reddy, A. Mallikarjuna; Reddy, Ch. Seshendra; Reddy, Y. Ashok Kumar; Lydia, R.; Reddy, P. Sreedhara; Reddy, A. Sivasankar // AIP Conference Proceedings;6/25/2012, Vol. 1451 Issue 1, p174 

    Nickel oxide (NiO) thin films were deposited on glass substrates at various substrate bias voltages by dc reactive magnetron sputtering technique. The effect of substrate bias voltage on the structural, morphological and compositional properties was systematically investigated by X-ray...

  • Influence of thickness on structural and optical properties of evaporated tin sulphide films. Cheng, Shuying; Zhang, Hong // Micro & Nano Letters;Jul2011, Vol. 6 Issue 7, p473 

    Tin sulphide (SnS) films with thicknesses of 65-580 nm have been deposited on glass substrates by thermal evaporation. The physical properties of the films were investigated using X-ray diffraction, scanning electron microscopy, atomic force microscopy, Raman spectroscopy and...

  • LOW TEMPERATURE SPUTTER DEPOSITION OF NANOSTRUCTURED TiN THIN FILMS. Pato, Robert A.; Petrisor Jr., Traian; Gabor, Mihai; Gavrila, Raluca; Negrea, Gavril // Metalurgia International;Sep2012, Vol. 17 Issue 9, p211 

    TiN thin films were deposited on silicon and steel substrates by reactive magnetron sputtering in Ar-N2 atmosphere at temperatures of 100, 200 and 300 o C and a pressure of 1 mtorr. By using a magnetic coil, placed inside the deposition chamber, the ion flux density on the substrate surface was...

  • Growth front roughening of room-temperature deposited copper nanocluster films. Palasantzas, G.; Koch, S. A.; De Hosson, J. Th. M. // Applied Physics Letters;8/5/2002, Vol. 81 Issue 6, p1089 

    Growth front aspects of copper nanocluster films deposited with low energy onto silicon substrates at room temperature are investigated by atomic force microscopy. Analyses of the height-difference correlation function yield a roughness exponent H of 0.45 ± 0.05. The root-mean-sqaure...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics