TITLE

Nucleation of copper on TiN and SiO[sub 2] from the reaction of hexafluoroacetylacetonate copper(I) trimethylvinylsilane

AUTHOR(S)
Ma, P. F.; Schroeder, T. W.; Engstrom, J. R.
PUB. DATE
April 2002
SOURCE
Applied Physics Letters;4/8/2002, Vol. 80 Issue 14, p2604
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The nucleation of copper on TiN and SiO[sub 2] surfaces has been investigated using a collimated molecular beam of hexafluroacetylacetonate copper(I) trimethylvinylsilane in ultrahigh vacuum. The Cu thin film precursor was delivered using a bubbler with H[sub 2] as the carrier gas and the substrate temperature was varied from 150 to 260 °C. Ex situ analysis of thin film morphology and microstructure has been conducted using scanning electron microscopy. On SiO[sub 2] surfaces the Cu nuclei density reaches a maximum near 5×10[sup 10] cm[sup -2], nearly independent of substrate temperature. In contrast, on TiN surfaces the maximum nuclei density is strongly dependent on temperature, varying nearly two orders of magnitude from 150 to 260 °C. On TiN the nucleation process is described well by established kinetic models where a maximum in nuclei density (N[sub max]) is predicted with respect to the time, and where this quantity exhibits an Arrhenius dependence on substrate temperature. © 2002 American Institute of Physics.
ACCESSION #
6427047

 

Related Articles

  • Optical characterization of CuInSe... epitaxial layers grown by molecular beam epitaxy. Yoshino, Kenji; Yokoyama, Hirosumi // Journal of Applied Physics;10/15/1999, Vol. 86 Issue 8, p4354 

    Details a study which examined the copper indium selenium... (CIS) grown on a gallium arsenic (GaAs) substrate (001) by molecular beam epitaxy. Photoquenching effect; Temperature dependence; Dependence of copper/indium ratio; Conclusions.

  • Interface structure and surface morphology of (Co, Fe, Ni)/Cu/Si(100) thin films. Demczyk, B. G.; Naik, V. M.; Lukaszew, A.; Naik, R.; Auner, G. W. // Journal of Applied Physics;11/1/1996, Vol. 80 Issue 9, p5035 

    Deals with a study which assessed bilayer Co/Cu, Fe/Cu, and Ni/Cu films deposited by molecular-beam epitaxy on hydrogen-terminated silicon substrates. Background on the magnetic anisotropy of thin films; Experimental details; Results and discussion.

  • Formation of Co nanoclusters in epitaxial Ti[sub 0.96]Co[sub 0.04]O[sub 2] thin films and their ferromagnetism. Kim, D. H.; Yang, J. S.; Lee, K. W.; Bu, S. D.; Noh, T. W.; Oh, S.-J.; Kim, Y.-W.; Chung, J.-S.; Tanaka, H.; Lee, H. Y.; Kawai, T. // Applied Physics Letters;9/23/2002, Vol. 81 Issue 13, p2421 

    Anatase Ti[sub 0.96]Co[sub 0.04]O[sub 2] films were grown epitaxially on SrTiO[sub 3] (001) substrates by using pulsed laser deposition with in-situ reflection high-energy electron diffraction. The oxygen partial pressure, P[sub O[sub 2]], during the growth was systematically varied. As P[sub...

  • New photoluminescence defect at 1.0192 eV in silicon molecular beam epitaxy layers ascribed to Cu. Sauer, R.; Asom, M.; People, R.; Lang, D. V.; Kimerling, L. C.; Bean, J. C. // Applied Physics Letters;10/12/1987, Vol. 51 Issue 15, p1185 

    We report a new photoluminescence defect spectrum with a no-phonon transition at 1.0192 eV which emerges in many silicon layers grown on silicon substrates by molecular beam epitaxy. Comparison of the no-phonon transition and the chief local mode (hω=7.5 meV) to the well-established...

  • Perpendicular giant magnetoresistance of microstructures in Fe/Cr and Co/Cu multilayers (invited). Gijs, M. A. M.; Giesbers, J. B.; Johnson, M. T.; aan de Stegge, J. B. F.; Janssen, H. H. J. M.; Lenczowski, S. K. J.; van de Veerdonk, R. J. M.; de Jonge, W. J. M. // Journal of Applied Physics;5/15/1994, Vol. 75 Issue 10, p6709 

    Presents a study that discussed the fabrication and microstructuring techniques of pillar structures made of high vacuum sputtered iron (Fe)/ chromium (Cr) multilayers and of molecular beam epitaxy evaporated cobalt (Co)/copper (Cu) multilayers. Growth and characterization of the multilayers;...

  • Epitaxial structure and magnetic anisotropies of metastable single crystal Co[sub 0.70]Mn[sub 0.30] film. Zhao, H. W.; Chen, Y.; Zhu, W. R.; Dong, G. S.; Jin, X. F.; Lu, M.; Zhai, H. R. // Journal of Applied Physics;2/15/1997, Vol. 81 Issue 4, p2036 

    Alloy films of Co[sub 0.70]Mn[sub 0.30] were grown on GaAs (001) substrates by molecular beam epitaxy at room temperature. The metastable tetragonally distorted single crystal structure was confirmed by reflection high energy electron diffraction and x-ray diffraction measurement, which...

  • Multilayer Permalloy films grown by molecular-beam epitaxy. Rook, K.; Zeltser, A. M.; Artman, J. O.; Laughlin, D. E.; Kryder, M. H.; Chrenko, R. M. // Journal of Applied Physics;4/15/1991, Vol. 69 Issue 8, p5670 

    Presents a study which had grown single and multilayer films of permalloy and copper on silicon substrates using molecular beam epitaxy. Experimental details; Results and discussion; Conclusion.

  • Dynamics of the formation of CD4 from the direct reaction of incident D atoms with CD3/Cu(111). Rettner, C. T.; Auerbach, D. J.; Lee, J. // Journal of Chemical Physics;12/8/1996, Vol. 105 Issue 22, p10115 

    Using molecular beam techniques we find that incident D atoms can abstract CD3 from a Cu(111) surface to yield CD4 in a direct (Eley–Rideal) gas–surface reaction with a cross section of ∼10-16 cm2/D atom. Dynamical evidence for a direct reaction includes the observation of an...

  • Effect of intracavity spatial filtering on the beam characteristics of a copper vapor laser. Singh, B.; Dixit, S. K.; Mittal, J. K.; Nakhe, S. V.; Bhatnagar, R. // Journal of Applied Physics;1/1/1991, Vol. 69 Issue 1, p537 

    Presents a study which demonstrated intracavity spatial filtering in a copper vapor laser (CVL) to achieve low divergence output beam. Characteristics of the output beam; Information on the temporal pulse shapes of the CVL; Average output power measured.

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics