Determining the profile of textured membranes by the alpha particle energy loss method

Kaiser, C.; Levy, Y.; Tiedje, T.; Young, Jeff F.; Kelson, I.
April 2002
Applied Physics Letters;4/8/2002, Vol. 80 Issue 14, p2607
Academic Journal
Alpha particle energy loss (AEL) spectroscopy was used to characterize a 5 μm pitch grating of silicon bars on a silicon dioxide membrane. Comparison of the data with simulated spectra shows that the angle of nonvertical grating sidewalls are readily quantified by AEL. The potential of AEL for distinguishing undercut and overcut etch profiles is assessed. © 2002 American Institute of Physics.


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