TITLE

Determining the profile of textured membranes by the alpha particle energy loss method

AUTHOR(S)
Kaiser, C.; Levy, Y.; Tiedje, T.; Young, Jeff F.; Kelson, I.
PUB. DATE
April 2002
SOURCE
Applied Physics Letters;4/8/2002, Vol. 80 Issue 14, p2607
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Alpha particle energy loss (AEL) spectroscopy was used to characterize a 5 μm pitch grating of silicon bars on a silicon dioxide membrane. Comparison of the data with simulated spectra shows that the angle of nonvertical grating sidewalls are readily quantified by AEL. The potential of AEL for distinguishing undercut and overcut etch profiles is assessed. © 2002 American Institute of Physics.
ACCESSION #
6427045

 

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