Comment on 'Seperation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation'

Yarykin, Nikolai
February 2002
Applied Physics Letters;2/25/2002, Vol. 80 Issue 8, p1492
Academic Journal
Comments on the separation of vacancy and interstitial depth profiles in ion-implanted silicon. Shift between depth profiles of the monovacancy and monointerstitial centers; Condition for a strong overlapping of resulting vacancy and interstitial profiles; Recombination of vacancies and self-interstitials.


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