Periodic oxide breakdown during oxidation of AIN/Sapphire (0001) films

Kang, H.C.; Seo, S.H.; Kim, J.W.; Noh, D.Y.
February 2002
Applied Physics Letters;2/25/2002, Vol. 80 Issue 8, p1364
Academic Journal
Examines the periodic oxide breakdown of Aluminum nitride (AIN)/Sapphire(0001) films. Exhibition of repeating transitions from linear to a parabolic oxidation behavior; Transformation of epitaxial AIN film into a planar epitaxial gamma-Al[sub 2]O[sub 3]/AIN interfacial motion; Periodic breakdown of oxides.


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