Real-time x-ray scattering study on the thermal evolution of interface roughness in CoSi[sub2] formation

Tae Soo Kang; Jung Ho Le
February 2002
Applied Physics Letters;2/25/2002, Vol. 80 Issue 8, p1361
Academic Journal
Examines the thermal evolution of interface roughness during cobalt silicide formation in the Co/Ti/Si(001) and Co/Si(001) systems. Use of real-time synchroton x-ray scattering measurement; Enhancement of the CoSi[sub 2]/Si(001) interface roughness; Suppression of the reaction between the cobalt overlayer and silicon substrate.


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