Tetragonal distortion of c domains in fatigued Pb(Zr,Ti)O[sub 3] thin films determined by x-ray diffraction measurements with highly brilliant synchrotron radiation

Kimura, Shigeru; Izumi, Koichi; Tatsumi, Toru
April 2002
Applied Physics Letters;4/1/2002, Vol. 80 Issue 13, p2365
Academic Journal
We performed x-ray diffraction measurements by using highly brilliant synchrotron radiation on only a small region of 250-nm-thick Pb(Zr[sub 0.33]Ti[sub 0.67])O[sub 3] polycrystalline films with gold top electrodes after applying various numbers of switching cycles of the electric field. The films were deposited on Pt/SiO[sub 2]/Si substrates by low-temperature metalorganic chemical vapor deposition. The plane spacing and integrated intensity of 004 and 400 diffraction patterns were plotted against the number of switching cycles. We found a good correlation between the increase in 004-plane spacing and the decrease in remanent polarization. This correlation indicates that tetragonal distortion of c domains is closely related to the fatigue phenomenon.


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