Growth of (103) fiber-textured SrBi[sub 2]Nb[sub 2]O[sub 9] films on Pt-coated silicon

Asayama, G.; Lettieri, J.; Zurbuchen, M. A.; Jia, Y.; Trolier-McKinstry, S.; Schlom, D. G.; Streiffer, S. K.; Maria, J-P.; Bu, S. D.; Eom, C. B.
April 2002
Applied Physics Letters;4/1/2002, Vol. 80 Issue 13, p2371
Academic Journal
(103) fiber-textured SrBi[sub 2]Nb[sub 2]O[sub 9] thin films have been grown on Pt-coated Si substrates using a SrRuO[sub 3] buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) SrRuO[sub 3] grains on (111) Pt grains and in turn (103) SrBi[sub 2]Nb[sub 2]O[sub 9] grains on (111) SrRuO[sub 3] grains. The films exhibit remanent polarization values of 9 µC/cm². The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures.


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