Approach to measure thermal efficiency of bolometer sensors

Mei, T.; Neuzil, P.; Karunasiri, G.; Zeng, W.
March 2002
Applied Physics Letters;3/25/2002, Vol. 80 Issue 12, p2183
Academic Journal
Evaluation of thermal efficiency is of great importance for verifying the design optimization of microbolometer-based sensors. In this work, a measurement technique has been developed to determine the thermal efficiency of a microbolometer without using structural and material parameters. The microbolometer thermal efficiency is obtained by measuring the responsivity under infrared illumination and responsivity for unity thermal efficiency using the self-heating effect. The thermal efficiency of a metal-film microbolometer sensor was determined using this technique to demonstrate its viability.


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