TITLE

Fabrication of palladium-based microelectronic devices by microcontact printing

AUTHOR(S)
Wolfe, Daniel B.; Love, J. Christopher; Paul, Kateri E.; Chabinyc, Michael L.; Whitesides, George M.
PUB. DATE
March 2002
SOURCE
Applied Physics Letters;3/25/2002, Vol. 80 Issue 12, p2222
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter demonstrates the patterning of thin films of metallic palladium by microcontact printing (µCP) of octadecanethiol, and the use of the patterned films in the fabrication of a functional sensor. This technique was also used to prepare templates of palladium for the electroless deposition of copper. The resistivity of the palladium and copper microstructures was 13.8 and 2.8 µΩcm, respectively; these values are approximately 40% larger than the values for the pure bulk metals. Palladium patterned into serpentine wires using µCP functioned as a hydrogen sensor with sensitivity of 0.03 vol % H[sub 2] in N[sub 2], and a response time of ∼ 10 s (at room temperature).
ACCESSION #
6358294

 

Related Articles

  • Phase formation and dissociation in the thin-film Pd/Al system. Colgan, E. G. // Journal of Applied Physics;9/15/1987, Vol. 62 Issue 6, p2269 

    Investigates the phase formation for thin films. Discussion on how the films were prepared; Initial phase observed growing when palladium (Pd) and aluminum (Al) react; Experimental measurement of the heats of formation of the Pd-Al alloys.

  • Comparison of two-dimensional Heisenberg and two-dimensional XY model behaviors in Pd(1.2 at. % Fe) films. McKinley, J. D. // Journal of Applied Physics;11/15/1994, Vol. 76 Issue 10, p7114 

    Focuses on a study which demonstrated two-dimensional (2D) Heisenberg and XY model behaviors in multilayer palladium thin films. Explanations on the 2D Heisenberg and XY model behaviors; Results and discussion; Conclusions.

  • Photo-decomposition of thin palladium acetate films with 126 nm radiation. Zhang, J.Y.; Boyd, I.W. // Applied Physics A: Materials Science & Processing;1997, Vol. 65 Issue 4/5, p379 

    Thin palladium films on quartz, Al[sub 2] O[sub 3] , AlN and Si substrates produced by vacuum ultraviolet induced decomposition of palladium acetate is described. The palladium films formed and the palladium acetate layers used were characterised by using ultraviolet spectrophotometry and...

  • Real-time spectroellipsometry investigation of the interaction of silane with a Pd thin film: Formation of palladium silicides. Yakovlev, V.; Drévillon, B.; Layadi, N.; Roca i Cabarrocas, P. // Journal of Applied Physics;8/15/1993, Vol. 74 Issue 4, p2535 

    Presents a study which reported the application of spectroscopic phase modulated ellipsometry to the study of both ultrafast and slow processes of the interaction of silane with thin films of palladium (Pd). Formation of palladium silicides by interaction of SiH[sub4] with Pd thin films;...

  • Thermal stability of the Al/PdxW100-x/Si contact systems. Eizenberg, M.; Thompson, R. D.; Tu, K. N. // Journal of Applied Physics;9/1/1985, Vol. 58 Issue 5, p1886 

    Studies the interactions of thin films of aluminum and palladium (Pd)-tungsten (W) deposited on silicon (Si) and on SiO[sub2]. Reason that the W-rich alloy is promising for contact applications in Si devices; Effects of isochromal annealings on the thin films deposited on SiO[sub1-]; X-ray...

  • Thickness dependence of the critical solution temperature of hydrogen in Pd films. Nicolas, M.; Dumoulin, L.; Burger, J. P. // Journal of Applied Physics;11/1/1986, Vol. 60 Issue 9, p3125 

    Determines the isotherms of very thin PdH films. Thickness potential of the films; Characteristics of polycrystalline films; Behavior of films at room temperature.

  • (100) metal alloy films containing body-centered cubic and face-centered cubic metals: Relation between structures and lattice spacings. Chang, Chin-An // Journal of Applied Physics;11/1/1992, Vol. 72 Issue 9, p4463 

    Presents a study that investigated (100) oriented metal alloy films containing both body-centered cubic and face-centered cubic metals deposited on (100) silicon using palladium/copper seed layers. Relations between alloys and their component elements; Epitaxial growth of both metals and metal...

  • Phase formation in the Pd-InP system. Caron-Popowich, R.; Washburn, J.; Sands, T.; Kaplan, A. S. // Journal of Applied Physics;11/15/1988, Vol. 64 Issue 10, p4909 

    Focuses on a study which examined the interaction of 40-nanometers palladium layers on chemically cleaned (100) indium phosphide substrates. Characteristics of palladium thin films on indium phosphide; Experimental procedure; Results and discussion.

  • Ion-beam direct-write mechanisms in palladium acetate films. Gross, M. E.; Brown, W. L.; Harriott, L. R.; Cummings, K. D.; Linnros, J.; Funsten, H. // Journal of Applied Physics;8/1/1989, Vol. 66 Issue 3, p1403 

    Presents information on a study which fabricated palladium (Pd) features by high-energy ion irradiation of thin Pd acetate films. Information on spin coating a Pd acetate; Structure of Pd acetate; Illustration of the fluence dependence of the infrared spectrum; Monitoring of gas evolution.

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics