Quantitative study of interface roughness replication in multilayers using x-ray reflectivity and transmission electron microscopy

Chla´dek, M.; Valvoda, V.; Dorner, C.; Holy´, C.; Grim, J.
August 1996
Applied Physics Letters;8/26/1996, Vol. 69 Issue 9, p1318
Academic Journal
The recently appeared distorted wave Born approximation formalism is used for quantitative determination of interface roughness replication and lateral correlation length in periodical multilayered structures. The results obtained from x-ray diffraction are in very good agreement with analysis of cross-section transmission electron micrographs. We interpret transparently the obtained parameters and demonstrate the ability of the low-angle x-ray diffraction methodology for nondestructive and quantitative studying of interface roughness in magnetic multilayers. © 1996 American Institute of Physics.


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