TITLE

Heteroepitaxial growth of KNbO3 single-crystal films on SrTiO3 by metalorganic chemical vapor deposition

AUTHOR(S)
Onoe, Atsushi; Yoshida, Ayako; Chikuma, Kiyofumi
PUB. DATE
July 1996
SOURCE
Applied Physics Letters;7/8/1996, Vol. 69 Issue 2, p167
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Potassium niobate (KNbO3) thin films have been deposited on silicon (Si) and strontium titanate (SrTiO3) substrates by metalorganic chemical vapor deposition. Stoichiometric KNbO3 films were obtained by adjusting the partial pressure of precursors. The crystallinity was examined by x-ray diffraction and reflection high-energy electron diffraction. Single-crystal (010) KNbO3 films with smooth surface were heteroepitaxially grown on (110)SrTiO3 substrate at 850 °C. © 1996 American Institute of Physics.
ACCESSION #
6289466

 

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