TITLE

A field-sensitive photoconductive probe for sampling through passivation layers

AUTHOR(S)
Hwang, Jiunn-Ren; Lai, Richard K.; Nees, John; Norris, Ted; Whitaker, John F.
PUB. DATE
October 1996
SOURCE
Applied Physics Letters;10/7/1996, Vol. 69 Issue 15, p2211
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A field-sensitive photoconductive sampling technique has been demonstrated in measurements performed through an insulating layer without the need for conductive contact. Sampled signals are sensed by a virtual-ground, floating-gate amplifier without draining charge from the device under test or the photoconductive switch. The minimum detectable signal is 2.5 μV/Hz1/2 with a spatial resolution of 7 μm, while the sampling bandwidth is essentially that observed using photoconductive sampling with a conductive contact to the device under test. The photovoltaic and shot current noise are negligible in comparison with the lock-in amplifier noise since the current flowing in this high-impedance, floating-gate probe is negligible. © 1996 American Institute of Physics.
ACCESSION #
6289405

 

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