Correlation between plasma expansion dynamics and gold-thin film structure during pulsed-laser deposition

Irissou, Eric; Le Drogoff, Boris; Chaker, Mohamed; Guay, Daniel
March 2002
Applied Physics Letters;3/11/2002, Vol. 80 Issue 10, p1716
Academic Journal
Pulsed-laser deposition of Au thin films has been achieved by ablating a gold target with a KrF excimer Laser in various conditions of ambient Ar gas pressure (from 10[sup -5] to 4 Torr) and target-to-substrate distance (from 1.0 to 11 cm). The dynamics of the plasma plume were measured in the same conditions. Highly oriented Au (111) thin films are obtained for pressure-distance deposition conditions such that the neutral Au species have a typical velocity larger than 2 km s[sup -1], while a polycrystalline powder is obtained when the typical velocity is smaller than 0.8 km s[sup -1]. © 2002 American Institute of Physics.


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