In situ pulsed laser deposition of large-area ceramic and multilayer films for applications in industry

Horwitz, J.S.; Knauss, L.A.; Chrisey, D.B.; Auyeung, R.C.Y.
October 1997
Review of Scientific Instruments;Oct97, Vol. 68 Issue 10, p3872
Academic Journal
Demonstrates that high-quality large-area high-temperature superconductor (HTS) films and multilayers can be produced with only a modest scale-up of the conventional pulsed laser deposition (PLD) technique. Experimental apparatus and procedure; Electrical transport measurements; Demonstration of the load-lock capability of the system.


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