TITLE

A new method for measuring thermal conductivity of thin films

AUTHOR(S)
Govorkov, S.; Ruderman, W.; Horn, M.W.; Goodman, R.B.; Rothschild, M.
PUB. DATE
October 1997
SOURCE
Review of Scientific Instruments;Oct97, Vol. 68 Issue 10, p3828
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Discusses the development of an inexpensive, east-to-use instrument for measuring the thermal conductivity of thin films based on a differential photoacoustic method. Consistency of the measurements made on silicon dioxide and silicon nitride with those reported previously for a different technique; Room temperature thermal conductivity of conventional polymer thin films.
ACCESSION #
627509

 

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