Design considerations and performance of a combined scanning tunneling and scanning electron microscope

Wiessner, A.; Kirschner, J.; Schafer, G.; Berghaus, Th.
October 1997
Review of Scientific Instruments;Oct97, Vol. 68 Issue 10, p3790
Academic Journal
Discusses the design and construction of a combination of a scanning tunneling microscope (STM) and a scanning electron microscope which is working under ultrahigh vacuum (UHV) conditions. Design concept and its realization; Description of the UHV chamber system; Influence of the electron beam on the STM measurement.


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