A two-dimensional flow sensor using integrated silicon spreading-resistance temperature detectors

Lai, P.T.; Zheng Xueren; Wu Zhaohui; Li Bin; Liu Baiyong
October 1997
Review of Scientific Instruments;Oct97, Vol. 68 Issue 10, p3785
Academic Journal
Describes a simple silicon two-dimensional (2D) flow sensor for the measurement of both flow direction and speed. Operating principle; Temperature dependence of resistance for spreading-resistance temperature (SRT) sensor; Analysis of 2D flow sensitivity.


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