TITLE

Development of interdigital transducer sensors for non-destructive characterization of thin films using high frequency Rayleigh waves

AUTHOR(S)
Deboucq, Julien; Duquennoy, Marc; Ouaftouh, Mohammadi; Jenot, Frédéric; Carlier, Julien; Ourak, Mohamed
PUB. DATE
June 2011
SOURCE
Review of Scientific Instruments;Jun2011, Vol. 82 Issue 6, p064905
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
In this paper, Rayleigh waves were generated and studied over a broad frequency range (5-50 MHz) and from the dispersion phenomenon, two substrate on layer type-samples with thin layer thicknesses of 1 μm and 500 nm, respectively, were characterized. The originality in this paper is the use of surface acoustic wave interdigital transducers (IDT) to generate surface waves as well as the development of a measuring device enabling an accurate estimation of the phase velocity to be obtained, which is essential in order to characterize such thin layers. Considering the excitation frequencies (5-50 MHz) and therefore the widths necessary on the electrodes for these types of IDT sensors (20-200 μm), a lift-off procedure was chosen to deposit the electrodes on the lithium niobate (LiNbO3) piezoelectric substrates. The use of these IDT, first enabled problems of loss and attenuation linked to the high frequency of conventional sensors (wedge sensors) to be overcome and second to carry out quasi-monochromatic measurements in order to obtain an extremely accurate estimation of the phase velocity with rapid post-processing. An inverse method provided a very precise estimation of the thickness of the layers and the elastic constants of the substrate. The estimations of the thicknesses were then confirmed by measurements with a profilometer.
ACCESSION #
62010825

 

Related Articles

  • Influence of ion implantation on the near-surface structure of thin Ni and Pd films on lithium niobate and lithium tantalate. Lysiuk, V. O.; Staschuk, V. S.; Kluy, M. I.; Vakulenko, O. V.; Poperenko, L. V. // Semiconductor Physics, Quantum Electronics & Optoelectronics;2007, Vol. 10 Issue 2, p76 

    The systems "thin Ni film - lithium niobate" and "thin Pd film - lithium tantalate" are implanted by Ar+ ions with an energy of 100 keV and a dose of 1016 cm-2. Analyses of the systems by AFM and SEM have shown that the ion implantation essentially modifies the near-surface structure resulting...

  • PIEZOELECTRIC BEHAVIOUR OF SPUTTERED ALUMINIUM NITRIDE THIN FILM FOR HIGH FREQUENCY ULTRASONIC SENSORS. Herzog, T.; Walter, S.; Bartzsch, H.; Gittner, M.; Gloess, D.; Heuer, H. // AIP Conference Proceedings;6/23/2011, Vol. 1335 Issue 1, p1663 

    Many new materials and processes require non destructive evaluation in higher resolutions by phased array ultrasonic techniques in a frequency range up to 250 MHz. This paper presents aluminium nitride, a promising material for the use as a piezoelectric sensor material in the considered...

  • GUIDED WAVES WITH AND WITHOUT DISPERSION. Joshi, Narayan R. // AIP Conference Proceedings;2/28/2008, Vol. 975 Issue 1, p55 

    In the application of elastic waves of ultrasonic frequencies for nondestructive evaluations of industrial components and welded structures various types of waves like Rayleigh waves, Surface waves, Longitudinal body waves, Shear body waves, and Lamb waves are used to detect defects in the...

  • Fabrication of a periodically domain-inverted structure in LiNbO[sub 3] thin film by a.... Momiji, Hiroshi; Kawamoto, Kazumi // Applied Physics Letters;10/24/1994, Vol. 65 Issue 17, p2154 

    Details the fabrication of a periodically domain-inverted structure in lithium niobate thin film by domain-transfer technique. Growth of the film by liquid phase epitaxy; Relationship between growth temperature and cross section of the inverted domain.

  • Fabrication of single-crystal lithium niobate films by crystal ion slicing. Levy, M.; Osgood, R. M.; Liu, R.; Cross, L. E.; Cargill, G. S.; Kumar, A.; Bakhru, H. // Applied Physics Letters;10/19/1998, Vol. 73 Issue 16 

    We report on the implementation of crystal ion slicing in lithium niobate (LiNbO[sub 3]). Deep-ion implantation is used to create a buried sacrificial layer in single-crystal c-cut poled wafers of LiNbO[sub 3], inducing a large etch selectivity between the sacrificial layer and the rest of the...

  • Dispersion characteristics in metal coated long period fiber gratings. Gu, Zhengtian; Shi, Yanjun; Gao, Kan // Optical & Quantum Electronics;Jun2012, Vol. 44 Issue 3-5, p303 

    Based on the coupled mode theory, the influences of material dispersion on the spectral characteristics of the gold coated long-period fiber grating (LPFG) are studied theoretically. The theoretical simulation indicates that there are a series of de-dispersion grating periods, under which the...

  • Thickness of the near-interface regions and central bulk ohmic resistivity in lead lanthanum zirconate titanate ferroelectric thin films. Chu, D. P.; Zhang, Z. G.; Migliorato, P.; McGregor, B. M.; Ohashi, K.; Hasegawa, K.; Shimoda, T. // Applied Physics Letters;12/30/2002, Vol. 81 Issue 27, p5204 

    We have developed a method to separate the low-resistive near-interface regions (NIRs) from the high-resistive central bulk region (CBR) in a ferroelectric thin film. The NIR thickness and the CBR resistivity can thus be accurately determined. Using lanthanum-doped lead zirconate titanate films...

  • Effect of Au drops on the phase velocity dispersion of Rayleigh waves in Si crystals. Tarasenko, A.; Bohac, P.; Fedorovich, R. D.; Jastrabik, L.; Picek, R. // Journal of Applied Physics;Sep2007, Vol. 102 Issue 6, p063516 

    Effect of Au drops on the phase velocity dispersion of Rayleigh waves in Si crystals We have measured the phase velocity dispersion of the Rayleigh waves on a (001)Si surface covered by a thin island film of Au. The effect of the film on the propagation of the acoustic surface waves is explained...

  • Wettability patterning of lithium niobate substrate by modulating pyroelectric effect to form microarray of sessile droplets. Ferraro, Pietro; Grilli, Simonetta; Miccio, Lisa; Vespini, Veronica // Applied Physics Letters;5/26/2008, Vol. 92 Issue 21, p213107 

    The wettability of lithium niobate crystals was patterned by inducing the pyroelectric effect onto domain engineered samples. Compared to conventional electrowetting experiments, this technique allows one to obtain wettability patterning by an electrodeless configuration. In fact, the surface...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics