TITLE

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

AUTHOR(S)
Hsieh, Tung Hsien; Jywe, Wen Yuh; Chen, Shang Liang; Liu, Chien Hung; Huang, Hsueh Liang
PUB. DATE
May 2011
SOURCE
Review of Scientific Instruments;May2011, Vol. 82 Issue 5, p056101
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is ±30 nm/200 nm and ±0.04 arcsec/0.1 arcsec at 1000 Hz.
ACCESSION #
62010789

 

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