Note: Design of transverse electron gun for electron beam based reactive evaporation system

Maiti, Namita; Barve, U. D.; Bhatia, M. S.; Das, A. K.
May 2011
Review of Scientific Instruments;May2011, Vol. 82 Issue 5, p056106
Academic Journal
In this paper design of a 10 kV, 10 kW transverse electron gun, suitable for reactive evaporation, supported by simulation and modeling, is presented. Simulation of the electron beam trajectory helps in locating the emergence aperture after 90o bend and also in designing the crucible on which the beam is finally incident after 270o bend. The dimension of emergence aperture plays a vital role in designing the differential pumping system between the gun chamber and the substrate chamber. Experimental validation is done for beam trajectory by piercing a stainless steel plate at 90o position which is kept above the crucible.


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