Thickness-dependent phase evolution of polycrystalline Pb(Zr[sub 0.35]Ti[sub 0.65])O[sub 3] thin films

Kelman, Maxim B.; Schloss, Lawrence F.; McIntyre, Paul C.; Hendrix, Bryan C.; Bilodeau, Steven M.; Roeder, Jeffrey F.
February 2002
Applied Physics Letters;2/18/2002, Vol. 80 Issue 7, p1258
Academic Journal
The structural and electrical properties of metalorganic chemical vapor deposition-grown Pb(Zr[SUB 0.35]Ti[SUB 0.65])O[SUB 3] thin films ranging in thickness from 700 to 4000 Ã… have been investigated. Cross-sectional scanning electron microscopy showed that these films are columnar, with grains extending through the thickness of the film. High-resolution x-ray diffraction showed that while the thickest films are tetragonal, with reflections corresponding to a-type and c-type domains, films thinner than 1500 Ã… are not. Electron backscatter diffraction and hysteresis loop measurements showed that the thinnest films are ferroelectric and have a rhombohedral crystal structure.


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