Response to “Comment on ‘On the mechanism of the cubic phase formation in the boron nitride thin-film systems’ ” [Appl. Phys. Lett. 80, 1306 (2002)]

Khizroev, S.; Litvinov, D.
February 2002
Applied Physics Letters;2/18/2002, Vol. 80 Issue 7, p1308
Academic Journal
Responds to the comments made on the research paper regarding the mechanism of the cubic phase formation in the boron nitride thin-film systems. Role of the stress in the cubic phase formation; Verification of the theory of nucleation and film growth; Reason for the irrelevance of the issue raised in the comment regarding plastic deformation of silicon substrates.


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