Open questions on noise in metal lines subjected to high current densities

Ciofi, C.; Dattilo, V.; Neri, B.
March 2000
AIP Conference Proceedings;2000, Vol. 511 Issue 1, p483
Academic Journal
Several types of low frequency noise and fluctuations have been reported in literature in the case of metallic interconnections subjected to current densities in the range of a few MA/cm2. Notwithstanding that the investigated samples were very similar to one another, quite different behaviors were reported. In this paper a list of the most debated questions regarding the noise measurements as well as the interpretation of the results is given. The existence of three different phenomena (1/f noise, electromigration noise and thermally induced resistance fluctuations) is assumed in order to justify the discrepancies found in the literature. Moreover, the possible correlation between these phenomena and the degradation of metal lines caused by Electromigration is discussed. © 2000 American Institute of Physics.


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