The EUV phase-shifting point diffraction interferometer

Naulleau, Patrick; Goldberg, Kenneth A.; Lee, Sang H.; Chang, Chang; Attwood, David; Bokor, Jeffrey
June 2000
AIP Conference Proceedings;2000, Vol. 521 Issue 1, p66
Academic Journal
The extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) was developed and implemented at Lawrence Berkeley National Laboratory to meet the significant measurement challenge of characterizing EUV projection lithography optics. The PS/PDI has been in continuous use and under ongoing development since 1996. Here we describe recent improvements made to the interferometer, and we summarize metrology results from state-of-the-art 10×-reduction EUV projection optics. © 2000 American Institute of Physics.


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