TITLE

Low-loss crystal-ion-sliced single-crystal potassium tantalate films

AUTHOR(S)
Izuhara, T.; Osgood, R. M.; Levy, M.; Reeves, M. E.; Wang, Y. G.; Roy, A. N.; Bakhru, H.
PUB. DATE
February 2002
SOURCE
Applied Physics Letters;2/11/2002, Vol. 80 Issue 6, p1046
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The dielectric response has been studied in 10-μm-thick, single-crystal potassium tantalate films formed by crystal ion slicing. Scanning microwave microscopy shows that the implanted, pre-etched samples exhibit a bulk-like permittivity and low-loss tangent (0.0009) at 1.7 GHz. The separated free-standing films have somewhat higher loss tangents due to residual-ion-induced stress. Selective relaxation of this stress by etching or annealing reduces the dielectric loss. © 2002 American Institute of Physics.
ACCESSION #
6005460

 

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