High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride–trifluoroethylene) copolymer

Xu, T.-B.; Cheng, Z.-Y.; Zhang, Q. M.
February 2002
Applied Physics Letters;2/11/2002, Vol. 80 Issue 6, p1082
Academic Journal
We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride–trifluoroethylene) [P(VDF–TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1 J/cm[sup 3]) of the active polymer [the electrostrictive P(VDF–TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters. © 2002 American Institute of Physics.


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