Spatially resolved electron temperature measurements with a microfabricated retarding field analyzer

Sowa, M. J.; Blain, M. G.; Jarecki, R. L.; Stevens, J. E.
February 2002
Applied Physics Letters;2/11/2002, Vol. 80 Issue 6, p932
Academic Journal
Electron temperature (T[sub e]) is an important parameter to quantify in the high-density plasmas commonly used in semiconductor manufacturing. T[sub e] is characteristic of the electron energy distribution which determines the plasma density and distribution of neutral and ionic species. Through application of theoretical considerations for the presheath and sheath, T[sub e] can be estimated from the ion energy distribution to a floating substrate. Utilizing microfabricated retarding field analyzers (RFAs) to measure the local ion energy distribution to a floating surface, spatially resolved T[sub e] measurements in an inductively coupled argon plasma have been made. Quantitative agreement between the RFA and Langmuir probe T[sub e] measurements was observed and the RFA T[sub e] measurements display the expected power, pressure, and spatial dependencies. © 2002 American Institute of Physics.


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