Photoacoustic characterization of the mechanical properties of thin films

Hernandez, Carmen M.; Murray, Todd W.; Krishnaswamy, Sridhar
January 2002
Applied Physics Letters;1/28/2002, Vol. 80 Issue 4, p691
Academic Journal
Narrow band photoacoustics (laser ultrasonics) are used to characterize the properties of free-standing nanometer-sized thin films. Photoacoustic generation is achieved by use of a microchip laser which deposits pulsed laser energy in the form of a spatially periodic source on the structure. The resulting narrow band ultrasonic modes are monitored using a Michelson interferometer. By varying the geometry of the spatially periodic source, a wide range of acoustic wave numbers is probed. Results are presented for two-layer thin film aluminum/silicon-nitride (Al/Si[sub 3]N[sub 4]) membranes. For such thin films, only the two lowest order guided modes are generated and these in turn can be related to sheet and flexural modes in plates. The mechanical properties and residual stress in the thin films are evaluated from measured acoustic dispersion curves for these two lowest order modes. © 2002 American Institute of Physics.


Related Articles

  • Generation of very high-frequency ultrasonic waves using thin films of vinylidene fluoride-trifluoroethylene copolymer. Kimura, Kuniko; Ohigashi, Hiroji // Journal of Applied Physics;5/15/1987, Vol. 61 Issue 10, p4749 

    Presents a study which examined the electromechanical properties of thin films of vinylidene fluoride-trifluoroethylene copolymer (P[VDF-TrFE]) and their application to ultrasonic transducers. Preparation of (P[VDF-TrFE]) and plane-type and concave-type transducers; Dielectric and mechanical...

  • Adhesion assessment of silicon carbide, carbon, and carbon nitride ultrathin overcoats by... Deng, Hong; Scharf, Thomas W. // Journal of Applied Physics;4/17/1997, Vol. 81 Issue 8, p5396 

    Presents experimental results for adhesion assessment of 20 nm ultrathin SiC, amorphous carbon and carbon nitride films deposited on silicon (111) substrates by sputtering. Nanoscratch system's sensitivity for detecting ultrathin overcoat cracking.

  • Assessment of thin-film hardness through elastic/plastic stress analysis in a microindentation test. Ahn, Jeong-Hoon; Kwon, Dongil // Journal of Applied Physics;10/1/1997, Vol. 82 Issue 7, p3266 

    Assesses the hardness of thin films through micromechanical analysis of composite hardness measured by a microindentation tester. Application of the modified plastic-zone volume-law-of-mixtures theory; Analysis of the indentation stress field of a film/substrate system; Analytical calculation...

  • Effects of mechanical stress on electromigration-driven transgranular void dynamics in passivated metallic thin films. Gungor, M. Rauf; Maroudas, Dimitrios; Gray, Leonard J. // Applied Physics Letters;12/28/1998, Vol. 73 Issue 26, p3848 

    The combined effects of mechanical stress and surface electromigration on the dynamics of transgranular voids in passivated metallic thin films are analyzed based on self-consistent dynamical simulations. Depending on the strength of the electric and stress fields, void morphological...

  • Pulsed-laser photoacoustics hears molecular vibrations. Small, Enoch W. // Laser Focus World;Mar96, Vol. 32 Issue 3, pS27 

    Focuses on pulsed-laser photoacoustics. Discussion on electrostriction; Attenuation of laser pulse by a neutral density filter; Sample holder; Disappearance of photoacoustic signals due to heat deposition; Applications of photoacoustics; Data analysis.

  • Perspective: Photoacoustic spectroscopy: “Linearization and signal recovery in photoacoustic infrared spectroscopy” [Rev. Sci. Instrum. 78, 051301 (2007)]. McClelland, John F. // Review of Scientific Instruments;May2007, Vol. 78 Issue 5, p050901 

    The article discusses the paper "Linearization and signal recovery in photoacoustic infrared spectroscopy," published in the same issue of the journal "Review of Scientific Instruments."

  • Dominant inelastic mechanisms in FCC metallic thin films and lines. Kobrinsky, Mauro J.; Thompson, Carl V. // AIP Conference Proceedings;2002, Vol. 612 Issue 1, p205 

    During fabrication, metallic thin films and lines typically develop high levels of stress that affect their performance and can lead to failure of devices based on them. A quantitative reliability assessment requires a thorough understanding of the mechanical behavior of these metallic...

  • Biaxial Young's modulus of silicon carbide thin films. Jean, A.; El Khakani, M.A.; Chaker, M.; Boily, S.; Gat, E.; Kieffer, J.C.; Pepin, H.; Ravet, M.F.; Rousseaux, F. // Applied Physics Letters;5/3/1993, Vol. 62 Issue 18, p2200 

    Investigates the biaxial Young's modulus of amorphous silicon carbide thin films. Techniques used in producing the thin films; Correlation of Young's modulus with silicon-carbon bond density; Determination of the film deflection.

  • Elastic properties of spin-on glass thin films. Carlotti, G.; Socino, G. // Applied Physics Letters;5/15/1995, Vol. 66 Issue 20, p2682 

    Analyzes the elastic properties of siloxane spin-on glass thin films. Use of films in the technology of integrated circuits; Measurement of biaxial stress as a function of time after deposition; Analysis on the phase velocity of Rayleigh and Sezawa acoustic modes.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics