Laser ablation of dielectrics with temporally shaped femtosecond pulses

Stoian, R.; Boyle, M.; Thoss, A.; Rosenfeld, A.; Korn, G.; Hertel, I. V.; Campbell, E. E. B.
January 2002
Applied Physics Letters;1/21/2002, Vol. 80 Issue 3, p353
Academic Journal
A significant improvement in the quality of ultrafast laser microstructuring of dielectrics is demonstrated by using temporally shaped pulse trains with subpicosecond separation. The sequential energy delivery induces a material softening during the initial steps of excitation changing the energy coupling for the subsequent steps. This leads to lower stress, cleaner structures, and provides a material-dependent optimization process. © 2002 American Institute of Physics.


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