TITLE

MEMS: A View from Aerospace

AUTHOR(S)
Clifford, Tom
PUB. DATE
October 2001
SOURCE
Circuits Assembly;Oct2001, Vol. 12 Issue 10, p30
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Focuses on the potential of micro-electro-mechanical systems (MEMS) in military and aerospace applications. Evidence of producibility, testability, functional quality and reliability; List of MEMS processes; Features of MEMS.
ACCESSION #
5876736

 

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