An integrated microfluidic chip with 40 MHz lead-free transducer for fluid analysis

Lee, S. T. F.; Lam, K. H.; Lei, L.; Zhang, X. M.; Chan, H. L. W.
February 2011
Review of Scientific Instruments;Feb2011, Vol. 82 Issue 2, p024903
Academic Journal
The design, fabrication, and evaluation of a high-frequency transducer made from lead-free piezoceramic for the application of microfluidic analysis is described. Barium strontium zirconate titanate [(Ba0.95Sr0.05)(Zr0.05Ti0.95)O3, abbreviated as BSZT] ceramic has been chosen to be the active element of the transducer. The center frequency and bandwidth of this high-frequency ultrasound transducer have been measured to be 43 MHz and 56.1%, respectively. The transducer was integrated into a microfluidic channel and used to measure the sound velocity and attenuation of the liquid flowing in the channel. Results suggest that lead-free high-frequency transducers could be used for in situ analysis of property of the fluid flowing through the microfluidic system.


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