Vapor–liquid–solid tri-phase pulsed-laser epitaxy of RBa[sub 2]Cu[sub 3]O[sub 7-y] single-crystal films

Yun, K. S.; Choi, B. D.; Matsumoto, Y.; Song, J. H.; Kanda, N.; Itoh, T.; Kawasaki, M.; Chikyow, T.; Ahmet, P.; Koinuma, H.
January 2002
Applied Physics Letters;1/7/2002, Vol. 80 Issue 1, p61
Academic Journal
We report on the fabrication of single-crystalline thin films of RBa[sub 2]Cu[sub 3]O[sub 7-y] (R: rare-earth element, R123) using an approach of vapor-liquid-solid tri-phase epitaxy. This method is based on application of pulsed-laser deposition under appropriate compositions and conditions predetermined from the relevant thermodynamic phase diagram. The laser-ablated gases of R, Ba, and Cu, and their oxides dissolve into a liquid Ba[sub 3]Cu[sub 5]O[sub x](3BaCuO[sub 2]+2CuO) layer placed on the film/substrate surface, penetrate to reach the liquid-solid interface with a seed R123, and are condensed into the solid R123 phase under a quasiequilibrium state. The uniform single-crystalline nature of the film was verified by x-ray diffraction, atomic-force microscopy, and transmission electron microscopy by the observation of giant grain size and atomic-scale surface smoothness.


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