Epitaxial ferroelectric Pb(Zr, Ti)O[sub 3] thin films on Si using SrTiO[sub 3] template layers

Wang, Y.; Ganpule, C.; Liu, B. T.; Li, H.; Mori, K.; Hill, B.; Wuttig, M.; Ramesh, R.; Finder, J.; Yu, Z.; Droopad, R.; Eisenbeiser, K.
January 2002
Applied Physics Letters;1/7/2002, Vol. 80 Issue 1, p97
Academic Journal
In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr, Ti)O[sub 3] (PZT) thin films on Si [100] substrates using a SrTiO[sub 3] (STO) template layer and a conducting perovskite (La[sub 0.5]Sr[sub 0.5])CoO[sub 3] electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d[sub 33] coefficients compared to textured and untextured polycrystalline films.


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