TITLE

High-quality, faceted cubic boron nitride films grown by chemical vapor deposition

AUTHOR(S)
Zhang, W. J.; Jiang, X.; Matsumoto, S.
PUB. DATE
December 2001
SOURCE
Applied Physics Letters;12/31/2001, Vol. 79 Issue 27, p4530
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Thick cubic boron nitride (cBN) films showing clear crystal facets were achieved by chemical vapor deposition. The films show the highest crystallinity of cBN films ever achieved from gas phase. Clear evidence for the growth via a chemical route is obtained. A growth mechanism is suggested, in which fluorine preferentially etches hBN and stabilizes the cBN surface. Ion bombardment of proper energy activates the cBN surface bonded with fluorine so as to enhance the bonding probability of nitrogen-containing species on the F-stabilized B (111) surface. © 2001 American Institute of Physics.
ACCESSION #
5742093

 

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