Infrared tunable filter by the use of electrostatic force

Saito, Mitsunori; Furukawa, Hideki
December 2001
Applied Physics Letters;12/24/2001, Vol. 79 Issue 26, p4283
Academic Journal
An infrared Fabry–Pe´rot filter was fabricated by stacking two silicon plates with 7 μm spacing. As higher voltage was applied between the plates, the spacing decreased gradually due to the electrostatic force, and consequently, the interference peaks in the transmission spectrum shifted to a shorter wavelength; e.g., the peak at the 14.3 μm wavelength shifted to 9.5 μm by 88 V application. The transmittance of a 3.39 μm He–Ne laser was modulated between 5% and 60% by applying a 12 V modulation voltage together with 80 V bias voltage. © 2001 American Institute of Physics.


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